Processes
Photolithography
Etching (microfabrication), such as RIE (Reactive-ion etching) or DRIE (Deep reactive-ion etching)
Thin film deposition, such as sputtering, chemical vapor deposition (CVD), evaporative deposition, or epitaxy
Thermal oxidation
Doping by either thermal diffusion or ion implantation
Wire bonding
Chemical-mechanical planarization (CMP)
Wafer cleaning, also known as "surface preparation" (see below)
Technologies
Semiconductor fabrication
Integrated circuit
Microelectronics
Sensors
Actuators
Transducers
Microfluidics
3D microfabrication
Fonte: Wikipedia
Photolithography
Etching (microfabrication), such as RIE (Reactive-ion etching) or DRIE (Deep reactive-ion etching)
Thin film deposition, such as sputtering, chemical vapor deposition (CVD), evaporative deposition, or epitaxy
Thermal oxidation
Doping by either thermal diffusion or ion implantation
Wire bonding
Chemical-mechanical planarization (CMP)
Wafer cleaning, also known as "surface preparation" (see below)
Technologies
Semiconductor fabrication
Integrated circuit
Microelectronics
Sensors
Actuators
Transducers
Microfluidics
3D microfabrication
Fonte: Wikipedia